Please use this identifier to cite or link to this item:
Title: Study of excitation rates in a hollow cathode discharge
Issue Date: 1-Jun-2013
Publisher: Sociedade Brasileira de Física
Description: In this work a dc discharge with a copper hollow cathode in argon used for deposition applications is investigated using atomic emission spectroscopy. Typical discharge parameters during our investigation are pressures between 80 and 200 Pa and current densities up to 7 mA cm-2. The radial light intensity profiles of some selected copper and argon lines were measured. An analysis of these profiles gives insigths into the excitation rates of the argon filling gas and the sputtered metal atoms as well as into the radial dimension of the negative glow. The different excitation mechanisms lead to a sharp change of the radial light intensity profiles emitted by many copper spectral lines, which indicates the transition region between the cathode fall and the negative glow. The length of the cathode fall was observed to be very insensitive to all the macroscopic discharge parameters. A nearly constant value was found for the cathode fall length, which corresponds to about 22% of the cathode radius.
Other Identifiers:
Appears in Collections:Physics and Astronomy

Files in This Item:
There are no files associated with this item.

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.