Characterization of Diamond-Like Film after Focused Ion Beam Processing

Please use this identifier to cite or link to this item: http://dspace.mediu.edu.my:8181/xmlui/handle/1721.1/3736

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DC Field	Value	Language
dc.creator	Fu, Yongqi	-
dc.creator	Ngoi, Kok Ann Bryan	-
dc.date	2003-11-29T20:01:36Z	-
dc.date	2003-11-29T20:01:36Z	-
dc.date	2003-01	-
dc.date.accessioned	2013-10-09T02:32:16Z	-
dc.date.available	2013-10-09T02:32:16Z	-
dc.date.issued	2013-10-09	-
dc.identifier	http://hdl.handle.net/1721.1/3736	-
dc.identifier.uri	http://koha.mediu.edu.my:8181/xmlui/handle/1721	-
dc.description	Optical properties (transmission and refractive index) and chemical structure (XPS) of diamond-like coating (DLC) film before and after focused ion beam milling (FIBM) process, were investigated in this paper. It is shown by our FIBM experiment that influence of FIBM on Optical properties and chemical structure of the DLC film is not apparent, especially in near-infra region. The film still can be used for optical applications. As an application example, diffractive optical element (DOE) was directly fabricated on the film by use of FIBM. Measured diffraction efficiency of the DOE is 73%, which is acceptable for conventional use.	-
dc.description	Singapore-MIT Alliance (SMA)	-
dc.format	75758 bytes	-
dc.format	application/pdf	-
dc.language	en_US	-
dc.relation	Innovation in Manufacturing Systems and Technology (IMST);	-
dc.subject	DLC	-
dc.subject	FIBM	-
dc.subject	optical properties	-
dc.subject	XPS	-
dc.title	Characterization of Diamond-Like Film after Focused Ion Beam Processing	-
dc.type	Article	-
Appears in Collections:	MIT Items

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