| dc.creator |
Zhang, Sam |
|
| dc.creator |
Fu, Yongqing |
|
| dc.creator |
Du, Hejun |
|
| dc.creator |
Liu, Yang |
|
| dc.creator |
Chen, Tupei |
|
| dc.date |
2003-12-13T17:28:56Z |
|
| dc.date |
2003-12-13T17:28:56Z |
|
| dc.date |
2004-01 |
|
| dc.date.accessioned |
2013-10-09T02:32:44Z |
|
| dc.date.available |
2013-10-09T02:32:44Z |
|
| dc.date.issued |
2013-10-09 |
|
| dc.identifier |
http://hdl.handle.net/1721.1/3836 |
|
| dc.identifier.uri |
http://koha.mediu.edu.my:8181/xmlui/handle/1721 |
|
| dc.description |
The design methodology and realization of nanocomposite films aiming for mechanical (superhardness, toughness) and functional (optical, microelectronic) properties were discussed in this paper. Superhard TiCrCN and nc-TiN/a-SiNx films and super-tough nc-TiC/a-C(Al) films were prepared through co-sputtering method by optimal design of microstructure. The nanocrystalline silicon (nc-Si) passivated with a matrix of thermally grown silicon dioxide were prepared using implantation of Si into SiO₂ film, and showed improved photoluminescence and optical properties. Also discussed is the nano-composite design of thin film resistor with optimized temperature coefficient of resistivity. |
|
| dc.description |
Singapore-MIT Alliance (SMA) |
|
| dc.format |
379704 bytes |
|
| dc.format |
application/pdf |
|
| dc.language |
en_US |
|
| dc.relation |
Advanced Materials for Micro- and Nano-Systems (AMMNS); |
|
| dc.subject |
nanocomposite |
|
| dc.subject |
films |
|
| dc.subject |
superhardness |
|
| dc.subject |
toughness |
|
| dc.subject |
photoluminescence |
|
| dc.subject |
optical |
|
| dc.title |
Nanocomposite Thin Films for both Mechanical and Functional Applications |
|
| dc.type |
Article |
|