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On Dual Actuation in Atomic Force Microscopes

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dc.creator El Rifai, Khalid
dc.creator El Rifai, Osamah M.
dc.creator Youcef-Toumi, Kamal
dc.date 2003-12-15T12:00:00Z
dc.date 2003-12-15T12:00:00Z
dc.date 2004-01
dc.date.accessioned 2013-10-09T02:33:10Z
dc.date.available 2013-10-09T02:33:10Z
dc.date.issued 2013-10-09
dc.identifier http://hdl.handle.net/1721.1/3914
dc.identifier.uri http://koha.mediu.edu.my:8181/xmlui/handle/1721
dc.description In this paper, the problem of dual actuation in the atomic force microscope (AFM) is analyzed. The use of two actuators to balance the trade-off between bandwidth, range, and precision has been recently extended to nano-positioning systems. Despite existing demands, this concept undergoes fundamental limitations towards its extension to AFMs. This is attributed to the non-conventional requirement imposed on the control signal response, as it used to create the image of the characterized surface.
dc.description Singapore-MIT Alliance (SMA)
dc.format 324338 bytes
dc.format application/pdf
dc.language en_US
dc.relation Innovation in Manufacturing Systems and Technology (IMST);
dc.subject dual actuation
dc.subject atomic force microscope
dc.subject piezotube
dc.subject piezocantilever
dc.subject plant transfer functions
dc.subject feedback systems
dc.title On Dual Actuation in Atomic Force Microscopes
dc.type Article


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