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Process Control in Micro-Embossing: A Review

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dc.creator Hardt, David E.
dc.creator Ganesan, Bala
dc.creator Qi, Wang
dc.creator Dirckx, Matthew
dc.creator Rzepniewski, Adam K.
dc.date 2003-12-15T12:00:00Z
dc.date 2003-12-15T12:00:00Z
dc.date 2004-01
dc.date.accessioned 2013-10-09T02:33:12Z
dc.date.available 2013-10-09T02:33:12Z
dc.date.issued 2013-10-09
dc.identifier http://hdl.handle.net/1721.1/3917
dc.identifier.uri http://koha.mediu.edu.my:8181/xmlui/handle/1721
dc.description Abstract— A promising technique for the large-scale manufacture of micro-fluidic devices and photonic devices is hot embossing of polymers such as PMMA. Micro-embossing is a deformation process where the workpiece material is heated to permit easier material flow and then forced over a planar patterned tool. In this work we review the basic process and the state of research with respect to manufacturing process control, where the latter is defined as methods for minimizing variation in the product while maximizing production rate. From this review we conclude the following: Several investigators have reported success at creating micron scale features using this process, but none have performed a formal characterization or optimization of the process.
dc.description Singapore-MIT Alliance (SMA)
dc.format 25876 bytes
dc.format application/pdf
dc.language en_US
dc.relation Innovation in Manufacturing Systems and Technology (IMST);
dc.subject micro-embossing
dc.subject PMMA
dc.subject microfluidic and photonic devices
dc.title Process Control in Micro-Embossing: A Review
dc.type Article


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