| dc.contributor |
Early, Kathleen. |
|
| dc.date |
2004-03-02T18:29:32Z |
|
| dc.date |
2004-03-02T18:29:32Z |
|
| dc.date |
1991 |
|
| dc.date.accessioned |
2013-10-09T02:34:24Z |
|
| dc.date.available |
2013-10-09T02:34:24Z |
|
| dc.date.issued |
2013-10-09 |
|
| dc.identifier |
no. 565 |
|
| dc.identifier |
http://hdl.handle.net/1721.1/4187 |
|
| dc.identifier.uri |
http://koha.mediu.edu.my:8181/xmlui/handle/1721 |
|
| dc.description |
Kathleen R. Early. |
|
| dc.description |
Includes bibliographical references (p. 155-163). |
|
| dc.description |
Research supported by Joint Services Electronics Program DAAL03-89-C-0001 Research supported by National Science Foundation ECS 87-09806 |
|
| dc.format |
163 p. |
|
| dc.format |
12011723 bytes |
|
| dc.format |
application/pdf |
|
| dc.language |
eng |
|
| dc.publisher |
Research Laboratory of Electronics, Massachusetts Institute of Technology |
|
| dc.relation |
Technical report (Massachusetts Institute of Technology. Research Laboratory of Electronics) ; 565. |
|
| dc.subject |
TK7855.M41 R43 no.565 |
|
| dc.title |
Experimental characterization and physical modeling of resolution limits in proximity printing x-ray lithography |
|