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Characterization of mechanical and optical properties of x-ray mask membranes

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dc.contributor Tsai, Flora S.
dc.date 2004-03-02T18:29:34Z
dc.date 2004-03-02T18:29:34Z
dc.date 1991
dc.date.accessioned 2013-10-09T02:34:24Z
dc.date.available 2013-10-09T02:34:24Z
dc.date.issued 2013-10-09
dc.identifier no.564
dc.identifier http://hdl.handle.net/1721.1/4188
dc.identifier.uri http://koha.mediu.edu.my:8181/xmlui/handle/1721
dc.description Flora S. Tsai.
dc.description Includes bibliographical references (leaves 48-49).
dc.description Research supported by the National Science Foundation. ECS 90-16437 Research supported by the Naval Research Laboratory. N00014-90-K-2018
dc.format 49 leaves
dc.format 2055944 bytes
dc.format application/pdf
dc.language eng
dc.publisher Research Laboratory of Electronics, Massachusetts Institute of Technology
dc.relation Technical report (Massachusetts Institute of Technology. Research Laboratory of Electronics) ; 564.
dc.subject TK7855.M41 R43 no.564
dc.title Characterization of mechanical and optical properties of x-ray mask membranes


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