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High Density Single Crystalline GaN Nanodot Arrays Fabricated Using Template-Assisted Selective Growth

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dc.creator Wang, Yadong
dc.creator Zang, Keyan
dc.creator Chua, Soo-Jin
dc.creator Fonstad, Clifton G. Jr.
dc.date 2004-12-10T13:46:06Z
dc.date 2004-12-10T13:46:06Z
dc.date 2005-01
dc.date.accessioned 2013-10-09T02:49:25Z
dc.date.available 2013-10-09T02:49:25Z
dc.date.issued 2013-10-09
dc.identifier http://hdl.handle.net/1721.1/7366
dc.identifier.uri http://koha.mediu.edu.my:8181/xmlui/handle/1721
dc.description High density, uniform GaN nanodot arrays with controllable size have been synthesized by using template-assisted selective growth. The GaN nanodots with average diameter 40nm, 80nm and 120nm were selectively grown by metalorganic chemical vapor deposition (MOCVD) on a nano-patterned SiO2/GaN template. The nanoporous SiO2 on GaN surface was created by inductively coupled plasma etching (ICP) using anodic aluminum oxide (AAO) template as a mask. This selective regrowth results in highly crystalline GaN nanodots confirmed by high resolution transmission electron microscopy. The narrow size distribution and uniform spatial position of the nanoscale dots offer potential advantages over self-assembled dots grown by the Stranski–Krastanow mode.
dc.description Singapore-MIT Alliance (SMA)
dc.format 547228 bytes
dc.format application/pdf
dc.language en
dc.relation Advanced Materials for Micro- and Nano-Systems (AMMNS);
dc.subject gallium nitride
dc.subject silicon dioxide
dc.subject nanodot arrays
dc.subject template-assisted selective growth
dc.title High Density Single Crystalline GaN Nanodot Arrays Fabricated Using Template-Assisted Selective Growth
dc.type Article


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