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Oblique Angle Deposition of Germanium Film on Silicon Substrate

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dc.creator Chew, Han Guan
dc.creator Choi, Wee Kiong
dc.creator Chim, Wai Kin
dc.creator Fitzgerald, Eugene A.
dc.date 2004-12-10T14:08:26Z
dc.date 2004-12-10T14:08:26Z
dc.date 2005-01
dc.date.accessioned 2013-10-09T02:49:26Z
dc.date.available 2013-10-09T02:49:26Z
dc.date.issued 2013-10-09
dc.identifier http://hdl.handle.net/1721.1/7370
dc.identifier.uri http://koha.mediu.edu.my:8181/xmlui/handle/1721
dc.description The effect of flux angle, substrate temperature and deposition rate on obliquely deposited germanium (Ge) films has been investigated. By carrying out deposition with the vapor flux inclined at 87° to the substrate normal at substrate temperatures of 250°C or 300°C, it may be possible to obtain isolated Ge nanowires. The Ge nanowires are crystalline as shown by Raman Spectroscopy.
dc.description Singapore-MIT Alliance (SMA)
dc.format 1682300 bytes
dc.format application/pdf
dc.language en
dc.relation Advanced Materials for Micro- and Nano-Systems (AMMNS);
dc.subject Oblique angle deposition
dc.subject Germanium nanowires
dc.title Oblique Angle Deposition of Germanium Film on Silicon Substrate
dc.type Article


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